APA   Click to copy
Sarkar, M., & Mohapatra, Y. N. (2014). Electron beam lithography in thick negative tone chemically amplified resist.

Chicago/Turabian   Click to copy
Sarkar, Mihir, and Y. N. Mohapatra. “Electron Beam Lithography in Thick Negative Tone Chemically Amplified Resist” (2014).

MLA   Click to copy
Sarkar, Mihir, and Y. N. Mohapatra. Electron Beam Lithography in Thick Negative Tone Chemically Amplified Resist. 2014.

@article{mihir2014a,
  title = {Electron beam lithography in thick negative tone chemically amplified resist},
  year = {2014},
  author = {Sarkar, Mihir and Mohapatra, Y. N.}
}