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Physics, Semicondcutors, Materials Science

Proton beam writing for minimum step lithography in multilayer patterning


Journal article


Mihir Sarkar, N. Shukla, N. Banerji, Y. N. Mohapatra
Other Conferences, 2012

Semantic Scholar DOI
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APA   Click to copy
Sarkar, M., Shukla, N., Banerji, N., & Mohapatra, Y. N. (2012). Proton beam writing for minimum step lithography in multilayer patterning. Other Conferences.


Chicago/Turabian   Click to copy
Sarkar, Mihir, N. Shukla, N. Banerji, and Y. N. Mohapatra. “Proton Beam Writing for Minimum Step Lithography in Multilayer Patterning.” Other Conferences (2012).


MLA   Click to copy
Sarkar, Mihir, et al. “Proton Beam Writing for Minimum Step Lithography in Multilayer Patterning.” Other Conferences, 2012.


BibTeX   Click to copy

@article{mihir2012a,
  title = {Proton beam writing for minimum step lithography in multilayer patterning},
  year = {2012},
  journal = {Other Conferences},
  author = {Sarkar, Mihir and Shukla, N. and Banerji, N. and Mohapatra, Y. N.}
}