ynm

Physics, Semicondcutors, Materials Science

Influence of hydrogen plasma treatment on boron implanted junctions in silicon


Journal article


S. Rangan, M. Horn, S. Ashok, Y. N. Mohapatra
2003

Semantic Scholar DOI
Cite

Cite

APA   Click to copy
Rangan, S., Horn, M., Ashok, S., & Mohapatra, Y. N. (2003). Influence of hydrogen plasma treatment on boron implanted junctions in silicon.


Chicago/Turabian   Click to copy
Rangan, S., M. Horn, S. Ashok, and Y. N. Mohapatra. “Influence of Hydrogen Plasma Treatment on Boron Implanted Junctions in Silicon” (2003).


MLA   Click to copy
Rangan, S., et al. Influence of Hydrogen Plasma Treatment on Boron Implanted Junctions in Silicon. 2003.


BibTeX   Click to copy

@article{s2003a,
  title = {Influence of hydrogen plasma treatment on boron implanted junctions in silicon},
  year = {2003},
  author = {Rangan, S. and Horn, M. and Ashok, S. and Mohapatra, Y. N.}
}