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Physics, Semicondcutors, Materials Science

Sensitivity of Electrically Active Defect Spectra to Processing Conditions in Mev Heavy Ion Implanted Silicon


Journal article


Y. N. Mohapatra, P. Giri
1999

Semantic Scholar DOI
Cite

Cite

APA   Click to copy
Mohapatra, Y. N., & Giri, P. (1999). Sensitivity of Electrically Active Defect Spectra to Processing Conditions in Mev Heavy Ion Implanted Silicon.


Chicago/Turabian   Click to copy
Mohapatra, Y. N., and P. Giri. “Sensitivity of Electrically Active Defect Spectra to Processing Conditions in Mev Heavy Ion Implanted Silicon” (1999).


MLA   Click to copy
Mohapatra, Y. N., and P. Giri. Sensitivity of Electrically Active Defect Spectra to Processing Conditions in Mev Heavy Ion Implanted Silicon. 1999.


BibTeX   Click to copy

@article{y1999a,
  title = {Sensitivity of Electrically Active Defect Spectra to Processing Conditions in Mev Heavy Ion Implanted Silicon},
  year = {1999},
  author = {Mohapatra, Y. N. and Giri, P.}
}